Design and simulation of an optimized electrothermal microactuator with Z-shaped beams
نویسندگان
چکیده
منابع مشابه
An electrothermal microactuator with Z-shaped beams
This paper introduces a Z-shaped thermal microactuator for in-plane motion, which could be complementary to the well-established comb drives and V-shaped thermal actuators. The Z-shaped actuators share many features in common with the V-shaped ones, but offer certain advantages such as smaller feature size and larger displacement. They also offer a large range of stiffness and output force that...
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ژورنال
عنوان ژورنال: Acta Universitaria
سال: 2015
ISSN: 2007-9621,0188-6266
DOI: 10.15174/au.2015.774